Mininni, Lars: search on Z-Library

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1

[IEEE 2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007 - Warsaw, Poland (2007.05.1-2007.05.3)] 2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007 - Measurement uncertainty in nanometrology: leveraging attributes of TEM and CD AFM

Liu, Hao-Chih, Dahlen, Gregory A., Osborn, Marc, Osborne, Jason R., Mininni, Lars, Tracy, Bryan, del Rosario, Amalia

Year:

2007

Language:

english

File:

PDF, 10.37 MB

english, 2007

2

High-Speed Atomic Force Microscopy Enables New Applications

Mininni, Lars, Slade, Andrea, Kindt, Johannes, Hu, Shuiqing

Journal:

Microscopy Today

Year:

2011

Language:

english

File:

PDF, 956 KB

english, 2011

3

SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - Improving sidewall profile metrology with enhanced 3D-AFM

Bao, Tianming, Chen, Alek C., Lin, Burn, Mininni, Lars, Dawson, Dean, Yen, Anthony

Year:

2008

Language:

english

File:

PDF, 849 KB

english, 2008

4

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Advances in CD-AFM scan algorithm technology enable improved CD metrology

Mininni, Lars, Foucher, Johann, Faurie, Pascal, Archie, Chas N.

Year:

2007

Language:

english

File:

PDF, 337 KB

english, 2007

5

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - TEM validation of CD AFM image reconstruction

Dahlen, Gregory A., Archie, Chas N., Mininni, Lars, Osborn, Marc, Liu, Hao-Chih, Osborne, Jason R., Tracy, Bryan, del Rosario, Amalia

Year:

2007

Language:

english

File:

PDF, 3.38 MB

english, 2007

6

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Metrology, Inspection, and Process Control for Microlithography XXVI - High-speed atomic force microscopy and peak force tapping control

Hu, Shuiqing, Mininni, Lars, Hu, Yan, Erina, Natalia, Kindt, Johannes, Su, Chanmin, Starikov, Alexander

Year:

2012

Language:

english

File:

PDF, 3.99 MB

english, 2012

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